Coating machine / Development machine
ASMO Technology With the development of the global semiconductor optoelectronic industry, it has owned well-known universities, research institutes, Chinese Academy of Sciences, Chinese Academy of Sciences and semiconductor-related industries in China.
ASMO provides customized desktop, floor-standing coating machine, development machine, including large machine board(> 500 X 500mm) rotary development / etching / cleaning equipment, spray coating (Spray Coater) And Slit-Spin Coater, etc.
Product introduction
Basic Specifications
Dimensions
Substrate Size
Operation Mode
Rotation Speed
Motor
Control System
Process Data
Options
800mm(W)x620mm(D)x480mm(H)
2–12 in wafer, fragment
Manual release / Manual loading
10-5,0000pm(±3rpm)
Mitsubishi AC Servo Motor
Mitsubishi PLC
10 groups
Automatic feeding arm, wafer edge cleaning / back-side cleaning
